Multipoint nanoprobe and method for fabrication

Details Multipoint nanoprobe and method for fabrication Multipoint nanoprobe and method for fabrication

2008-03-04

2008-03-04

Arbes, Carl J. (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S592100, C029S874000, C029S884000

Reexamination Certificate

active

11251943

ABSTRACT:
A nanoprobe includes a substrate having a layer, which forms a projected portion. A plurality of conductive lines is adhered to the projected portion and the lines extend beyond an end of the projected portion by a distance to form contact points, wherein the lines are connected to material of the projected portion to provide stiffness and the contact points provide flexibility during use.

REFERENCES:
Silicon Micromachined Thermal Profilers, by Gianchandani et al, in Proc. of 1993 IEEE International Electron Devices Meeting, Conference dates Dec. 5, 1993-Dec. 8, 1993, pp. 191-194 (1993).

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