Physical quantity sensor having multiple through holes

Details Physical quantity sensor having multiple through holes Physical quantity sensor having multiple through holes

2008-03-04

2008-03-04

Kwok, Helen (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

C073S514290

Reexamination Certificate

active

11649254

ABSTRACT:
A semiconductor physical quantity sensor includes: a substrate; a semiconductor layer supported on the substrate; a trench disposed in the semiconductor layer; and a movable portion disposed in the semiconductor layer and separated from the substrate by the trench. The movable portion includes a plurality of through-holes, each of which penetrates the semiconductor layer in a thickness direction. The movable portion is capable of displacing on the basis of a physical quantity applied to the movable portion so that the physical quantity is detected by a displacement of the movable portion. The movable portion has a junction disposed among the through-holes. The junction has a trifurcate shape.

REFERENCES:
patent: 5228341 (1993-07-01), Tsuchitani et al.
patent: 5350189 (1994-09-01), Tsuchitani et al.
patent: 5983721 (1999-11-01), Sulzberger et al.
patent: 6046067 (2000-04-01), Werner
patent: 6151966 (2000-11-01), Sakai et al.
patent: 6350189 (2002-02-01), Tanaka
patent: 6430999 (2002-08-01), Murata et al.
patent: 6450029 (2002-09-01), Sakai et al.
patent: 6450033 (2002-09-01), Ito et al.
patent: 6583374 (2003-06-01), Knieser et al.
patent: 6848310 (2005-02-01), Goto
patent: 6953753 (2005-10-01), Oohara et al.
patent: 6973829 (2005-12-01), Sakai et al.
patent: 7077007 (2006-07-01), Rich et al.
patent: A-10-062448 (1998-03-01), None
patent: A-2001-133268 (2001-05-01), None
Office Action mailed Aug. 21, 2007 from Japanese Patent Office in corresponding Japanese Patent Application No. 2004-118887 ( and English translation).

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