Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Including integrally formed optical element
Reexamination Certificate
2008-04-22
2008-04-22
Healy, Brian M. (Department: 2883)
Semiconductor device manufacturing: process
Making device or circuit emissive of nonelectrical signal
Including integrally formed optical element
C438S029000, C385S129000, C385S130000, C385S132000, C385S014000, C216S024000
Reexamination Certificate
active
11692519
ABSTRACT:
An optical waveguide device which includes an optical waveguide part and a photonic device mounting part is provided. A mask is patterned after high-temperature annealing to form a pedestal block on which a light emitting device is mounted. Thus, there is no influence on the mask, even if the device undergoes the heat treatment at a high temperature during the manufacturing process. This enables formation of the pedestal block with high accuracy. Therefore, it is possible to achieve an optical coupling with high accuracy in mounting a light emitting device on the pedestal block.
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