Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate
2008-07-08
2008-07-08
Nguyen, Kiet T (Department: 2881)
Radiant energy
Irradiation of objects or material
Irradiation of semiconductor devices
C250S442110
Reexamination Certificate
active
11701414
ABSTRACT:
A specimen fabrication apparatus including: a vacuum chamber that accommodates a sample stage to mount a sample, an irradiating optical system that irradiates a focused ion beam to the sample to form a specimen, and a specimen holder placed in the vacuum chamber, to which said formed specimen is transferred by transferring means while the specimen chamber remains substantially sealed.
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Doi Yasunori
Kawanami Yoshimi
Madokoro Yuichi
Tomimatsu Satoshi
Umemura Kaoru
Antonelli, Terry Stout & Kraus, LLP.
Hitachi , Ltd.
Nguyen Kiet T
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