Stage device, exposure apparatus using the unit, and device...

Details Stage device, exposure apparatus using the unit, and device... Stage device, exposure apparatus using the unit, and device...

2008-01-15

2008-01-15

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S075000

Reexamination Certificate

active

11286780

ABSTRACT:
A stage device includes a plurality of bases positioned adjacent each other with a space therebetween, a plurality of stages movable along surfaces of the bases, and a plurality of gas bearings provided in each of the stages. The gas bearings extend in a direction in which the bases are adjacently arranged.

REFERENCES:
patent: 4742286 (1988-05-01), Phillips
patent: 6285102 (2001-09-01), Matsuoka et al.
patent: 6590634 (2003-07-01), Nishi et al.
patent: 6987335 (2006-01-01), Korenaga
patent: 2004/0126907 (2004-07-01), Korenaga
patent: 8-028564 (1996-02-01), None
patent: 2004-254489 (2004-09-01), None

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