Method of testing using compliant contact structures,...

Metal working – Method of mechanical manufacture – Electrical device making

Reexamination Certificate

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Details

C029S592100, C029S832000, C029S854000, C324S754090, C324S755090, C324S765010, C438S017000, C438S611000, C438S639000

Reexamination Certificate

active

11336538

ABSTRACT:
A compliant contact structure and contactor card for operably coupling with a semiconductor device to be tested includes a substantially planar substrate with a compliant contact formed therein. The compliant contact structure includes a portion fixed within the substrate and at least another portion integral with the fixed portion, laterally unsupported within a thickness of the substrate and extending beyond a side thereof. Dual-sided compliant contact structures, methods of forming compliant contact structures, a method of testing a semiconductor device and a testing system are also disclosed.

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