Method for analysis through layer-by-layer sample removal...

Details Method for analysis through layer-by-layer sample removal... Method for analysis through layer-by-layer sample removal...

2008-07-22

2008-07-22

Cygan, Michael (Department: 2855)

Measuring and testing

Surface and cutting edge testing

Roughness

C083S915500

Reexamination Certificate

active

11567868

ABSTRACT:
A method and apparatus for analysis of a sample. The method includes an accessing operation for accessing a region of the sample via a tip of at least one probe mounted on a cantilever. A removing operation removes a sample material from the region that is accessed by the tip of the at least one probe mounted on the cantilever. A sensing operation senses a parameter associated to the removal of the sample material in the removing operation. The accessing, removing, and sensing operations are repeated to facilitate removal of at least one layer of the sample.

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patent: 5410910 (1995-05-01), Yang et al.
patent: 6546788 (2003-04-01), Magerle
patent: 6635870 (2003-10-01), Pachuta et al.
patent: 6923044 (2005-08-01), Kley
patent: 2002/0125427 (2002-09-01), Chand et al.

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