Piezoelectric/electrostrictive film element

Details Piezoelectric/electrostrictive film element Piezoelectric/electrostrictive film element

2008-09-23

2008-09-23

Dougherty, Thomas M (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S365000, C310S366000, C257S419000

Reexamination Certificate

active

11960923

ABSTRACT:
A lower electrode4and an auxiliary electrode8, a piezoelectric/electrostrictive film5, and an upper electrode6are sequentially arranged in layers on a substrate1. The lower electrode4is continuously formed in a region ranging from a first portion of the thick-walled portion2to a thin-walled diaphragm portion3. The auxiliary electrode8is continuously formed in a region ranging from a second portion of the thick-walled portion2opposite the first portion to a position on the thin-walled diaphragm portion3, the position being separated from the lower electrode4. The upper electrode6is formed in such a manner as to overlie the piezoelectric/electrostrictive film5and the auxiliary electrode8. Furthermore, a connection electrode20is provided for electrically connecting the upper electrode6and the auxiliary electrode8. Thus, a plurality of paths are provided for electrically connecting the upper electrode6and the auxiliary electrode8. Therefore, even when connection through a certain path is cut off due to fracture of a portion of the upper electrode6caused by deterioration in insulating performance of the piezoelectric/electrostrictive film5, electrical connection between the upper electrode6and the auxiliary electrode8can be maintained through the remaining path(s).

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patent: 2004-186436 (2004-07-01), None

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