Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2008-03-25
2008-03-25
San Martin, J. (Department: 2834)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
C347S068000
Reexamination Certificate
active
11043704
ABSTRACT:
A lead content in a piezoelectric thin film (3) of a piezoelectric element (20) is made smaller as compared to stoichiometric composition. More specifically, the piezoelectric thin film (3) is made of lead zirconate titanate expressed as Pb(1-x)(Zr(1-s)Tis)O3(0<s<1) or lead-zirconate-titanate-based oxide expressed as (Pb(1-x-y)Ay)(Zr(1-s-t)TisBt)O3(0<s<1, 0<t<1-s) where A is a substitutive metal ion in an A-site in the perovskite crystalline structure and B is a substitutive metal ion in a B-site in the perovskite crystalline structure. The value of x, which indicates a deficiency in Pb content in each composition, is more than 0 but not more than 0.15.
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Vasant Kumar, C. V. R., et al.; “Crystallization of sputtered lead zirconate titanate films by rapid thermal processing”; Journal of Applied Physics; USA; vol. 71, No. 2; Jan. 15, 1992; pp. 864-874; XP002371777; ISSN: 0021-8979.
Fujii Eiji
Kamada Takeshi
Torii Hideo
Harness & Dickey & Pierce P.L.C.
Martin J. San
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