Measuring and testing – Volume or rate of flow – Thermal type
Reexamination Certificate
2008-04-22
2008-04-22
Patel, Harshad (Department: 2855)
Measuring and testing
Volume or rate of flow
Thermal type
Reexamination Certificate
active
11202017
ABSTRACT:
A thermal type air flow meter that makes it possible to precisely and easily determine whether a sensor element is a non-defective or a defective by screening is provided. First and second diaphragm sections composed of an electrical insulating film are formed in a semiconductor substrate. A heating resistor and a resistor for intake air temperature sensor are disposed on them to obtain a sensor element for thermal type air flow meters. The length of the short sides W1of the rectangular first diaphragm section is made substantially equal to the length of the short sides of the second diaphragm section rectangular as well. Thus, the pressures applied to each of the diaphragm sections are substantially identical with each other in pressurization during screening.
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Matsumoto Masahiro
Nakano Hiroshi
Watanabe Izumi
Yamada Masamichi
Crowell & Moring LLP.
Hitachi , Ltd.
Patel Harshad
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