Lithographic apparatus and method of reducing thermal...

Details Lithographic apparatus and method of reducing thermal... Lithographic apparatus and method of reducing thermal...

2008-04-15

2008-04-15

Rutledge, D. (Department: 2851)

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

C355S053000, C355S067000, C378S034000

Reexamination Certificate

active

11440437

ABSTRACT:
A lithographic apparatus is disclosed that has a heater configured to supply energy to a patterning device to heat the patterning device to form a desired thermal distortion pattern of the patterning device and a controller configured to effect an optical correction in the apparatus corresponding to the desired thermal distortion pattern to reduce the effect of thermal distortion of the patterning device on a pattern.

REFERENCES:
patent: 6440619 (2002-08-01), Feldman
patent: 6445439 (2002-09-01), McCullough
patent: 6455821 (2002-09-01), Stumbo
patent: 6809793 (2004-10-01), Phan et al.
patent: 2002/0148976 (2002-10-01), Chalupka et al.

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