Piezoelectric actuator and scanning probe microscope using...

Details Piezoelectric actuator and scanning probe microscope using... Piezoelectric actuator and scanning probe microscope using...

2008-09-23

2008-09-23

Pyo, Kevin (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

C250S234000, C359S198100, C310S328000, C310S345000

Reexamination Certificate

active

11827110

ABSTRACT:
A leaf spring4constituting an elastic member one end of which is fixed to a foundation6, and other end of which is brought into contact with a laminating type piezoelectric element2or a driven member5is constituted such that a thickness is thinned from a side of the foundation6to a side of the laminating type piezoelectric element2to make a moment of inertia smaller on a side of a portion of other end held by the laminating type piezoelectric element2than a portion on one end side fixed to the foundation6. Further, a strain gage sensor8is attached to a side face4aof the leaf spring4constituting one face of one end of the leaf spring4proximate to the laminating type piezoelectric element2orthogonal to a direction of elongating and contracting the laminating type piezoelectric element2constituting a side of the driven member5.

REFERENCES:
patent: 5579148 (1996-11-01), Nishikawa et al.
patent: 10173247 (1998-06-01), None

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