Electric heating – Microwave heating – Tunnel furnace
Patent
1983-05-10
1985-04-23
Edlow, Martin H.
Electric heating
Microwave heating
Tunnel furnace
357 59, 357 65, 219121LJ, H01L 2940, H01L 2904, H01L 2942, B23K 924
Patent
active
045133107
ABSTRACT:
A first wiring to be connected as needed and second wirings to be disconnected as needed are formed three-dimensionally with an insulation film interposed therebetween. The first wiring comprises at least three first semiconductor regions of a second conductivity type formed at predetermined intervals in the surface of a semiconductor substrate of a first conductivity type, and second semiconductor regions of the first conductivity type formed between each pair of adjacent first semiconductor regions. The second wirings are formed on the first wiring through the insulation film and in a number equal to that of the second semiconductor regions. Each second wiring and the corresponding second semiconductor region are located within a spot of a radiating means radiated vertically onto the semiconductor substrate for switching the wirings.
REFERENCES:
patent: 3584183 (1968-10-01), Chiaretta et al.
patent: 3792319 (1974-02-01), Tsang
patent: 3882532 (1975-05-01), Quinn
Minato et al., "Hi-CMOS II 4K Static RAM," ISSCC Digest of Technical Papers, p. 14, Feb. 18, 1981.
Kokkonen et al., "Redundancy Techniques for Fast Static RAMs," IEEE Digest of Technical Papers, p. 80, Feb. 18, 1981.
Konishi Satoshi
Ohno Jun-ichi
Edlow Martin H.
Henn Terri M.
Tokyo Shibaura Denki Kabushiki Kaisha
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