Piezoelectric actuator array and manufacturing method

Details Piezoelectric actuator array and manufacturing method Piezoelectric actuator array and manufacturing method

2008-03-11

2008-03-11

Schuberg, Darren (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

Reexamination Certificate

active

10635408

ABSTRACT:
There is disclosed a one-dimensional piezoelectric actuator array1houses a piezoelectric device35including a plate or pillar-shaped piezoelectric member4and electrodes18, 19,and having a planar form; the device35being driven by a piezoelectric effect of the piezoelectric member4.The piezoelectric device35is formed as a whole in a planar comb shape wherein comb teeth26are connected to one another in one end, and portions of the comb teeth26work as a plurality of driving portions31.The guide substrate2and piezoelectric device substrate3are integrally unified in such a manner that the resultant is readily usable for the formation of a multiply stuck structural body. In case of need, the array may be further provided with a guide substrate2having a concave portion9for housing at least a part of the piezoelectric device substrate3.

REFERENCES:
patent: 6584660 (2003-07-01), Shimogawa et al.
patent: 6794723 (2004-09-01), Takeuchi et al.
patent: 3058143 (1999-08-01), None

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