Metal working – Method of mechanical manufacture – Electrical device making
Reexamination Certificate
2008-07-15
2008-07-15
Kim, Paul D (Department: 3729)
Metal working
Method of mechanical manufacture
Electrical device making
C029S603130, C029S603140, C029S603150, C029S603180, C205S119000, C205S122000, C360S122000, C360S317000, C360S319000, C204S192100, C204S192340, C451S005000, C451S041000
Reexamination Certificate
active
11093962
ABSTRACT:
This invention describes a manufacturable method, including a CMP liftoff process, for removing masking materials after ion milling for fabricating the write pole of a magnetic head. Significant parameters for the CMP assisted liftoff process include the thickness of the remaining mask materials after the write pole ion milling for effective CMP assisted liftoff, the thickness of the dielectric fill material deposited to protect the write pole during the CMP liftoff step, and the type of CMP slurry, polishing pad and the polishing conditions that are required to yield satisfactory results.
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Le Quang
Li Jui-Lung
Guillot Robert O.
Hitachi Global Storage Technologies - Netherlands B.V.
Intellectual Property Law Offices
Kim Paul D
LandOfFree
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