Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate
2008-01-29
2008-01-29
Paik, Sang (Department: 3742)
Electric heating
Heating devices
Combined with container, enclosure, or support for material...
C292S258000
Reexamination Certificate
active
11313759
ABSTRACT:
A heat treatment apparatus enables a rapid temperature rise of an object to be processed while giving an excellent economical efficiency. A heating unit heats an object to be heated by irradiating a light onto the object. A plurality of lamps are provided in a lamp house. The lamps include at least one first lamp and a plurality of second lamps each having an irradiation area smaller than that of the first lamp. The lamp house has a first lamp accommodation part at a center thereof and a second lamp accommodation part surrounding the first lamp accommodation part so that the first lamp accommodation part accommodates the first lamp and the second lamp accommodation part accommodates the second lamps.
REFERENCES:
patent: 2523033 (1950-09-01), Leighton
patent: 4442374 (1984-04-01), Morris et al.
patent: 6072160 (2000-06-01), Bahl
patent: 6232580 (2001-05-01), Sandhu
patent: 6518547 (2003-02-01), Takahashi et al.
Finnegan Henderson Farabow Garrett & Dunner LLP
Paik Sang
Tokyo Electron Limited
LandOfFree
Heat treatment apparatus using a lamp for rapidly and... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Heat treatment apparatus using a lamp for rapidly and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Heat treatment apparatus using a lamp for rapidly and... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3927312