Method for laser micromachining

Details Method for laser micromachining Method for laser micromachining

2008-05-13

2008-05-13

Evans, Geoffrey S. (Department: 1793)

Electric heating

Metal heating

By arc

C219S121680, C219S121830

Reexamination Certificate

active

10551489

ABSTRACT:
A method of laser micro-machining a work piece, with a laser, including the steps of: locating the workpiece on a carrier forming a part of a transport system, the carrier can be displaced along a path parallel to an X-axis of the workpiece, a Y-axis lying transverse the path, and a Z-axis lying transverse the path; focusing an image generated by an output beam from the laser at a working datum position defined relative to the path which path is established by the transport system to traverse the first datum position; a plane defined by the X- and Y-axis lying substantially perpendicular to the output beam; and displacing the workpiece along the path by way of the transport system so as to enable the work-piece to be subject to micro-machining by way of the laser.

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Abbott C et al: “New Techniques for Laser Micromachining MEMS Devices” 2002, Proceedings of the SPIE, SPIE, Bellingham, VA, US pp. 281-288 xp001193877 issn: 0277-786x (To Follow).

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