Pressure sensor

Details Pressure sensor Pressure sensor

2008-05-20

2008-05-20

Thompson, Jewel (Department: 2855)

Measuring and testing

Fluid pressure gauge

Electrical

Reexamination Certificate

active

11586512

ABSTRACT:
A lower capacitive electrode and a capacitive electrode of an opposite substrate are provided to mutually facing surfaces of a TFT substrate and the opposite substrate, respectively; and a seal member is provided to the peripheral part of both substrates. The seal member creates a predetermined gap between the substrates, and the surrounded space is sealed by the seal member. A pressure sensor measures pressure applied to the substrates based on variations in capacitance between the lower capacitive electrode and the facing-substrate capacitive electrode. An acceleration sensor is incorporated into the TFT substrate within the pressure sensor. The presence of the acceleration sensor inside the pressure sensor thereby eliminates the need for a separate pressure sensor and acceleration sensor, and allows a pressure sensor that improves the moisture resistance of the acceleration sensor to be provided.

REFERENCES:
patent: 5259247 (1993-11-01), Bantien
patent: 56-027630 (1981-03-01), None
patent: 11-259234 (1999-09-01), None

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