Chemical filter and fan filter unit having the same

Details Chemical filter and fan filter unit having the same Chemical filter and fan filter unit having the same

2008-01-22

2008-01-22

Smith, Duane (Department: 1797)

Gas separation

With means securing or retaining separating media

Unit or cohesive sheet-like media in flow line or frame

C055S385200, C055S505000, C055S471000, C055S318000, C055S482000, C055S510000, C096S134000, C096S142000

Reexamination Certificate

active

11083121

ABSTRACT:
In a fan filter unit for filtering and continuously supplying clean air into a clean room, the fan filter unit includes a chemical filter for removing chemical contaminants contained in the air, a fan for sucking and blowing out the air, and a particle filter for removing particles such as dusts and moisture contained in the air. A filter medium of the chemical filter has a circular tube shape and is disposed between an inner circular tube and an outer circular tube. A cover is detachably combined with top portions of the inner and the outer circular tubes, and prevents air flow through the top portions of the inner and outer circular tubes. The air is sucked only through the outer circular tube, the chemical filter and the inner circular tube by a suction force of the fan. Accordingly, velocity distribution of the air passing through the chemical filter may be improved and lifetime of the chemical filter may be increased.

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