Method of manufacturing a self-sustaining center-anchor...

Details Method of manufacturing a self-sustaining center-anchor... Method of manufacturing a self-sustaining center-anchor...

2008-05-20

2008-05-20

Phan, Tim (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S825000, C029S846000, C029S874000, C029S876000, C200S181000, C335S078000, C335S262000

Reexamination Certificate

active

11636449

ABSTRACT:
Provided is a manufacturing method of self-sustaining center-anchor microelectromechanical switch driven by an electrostatic force used for controlling a signal transmission in an electronic system, which can suppress deformation of a movement plane generated during manufacturing and operation process by inserting the self-sustaining center-anchor, and improve a ground line contact phenomenon of an upper electrode, thereby enhancing reliability and signal isolation feature while maintaining an existing insertion loss feature compared to the microelectromechanical switch of the prior art.

REFERENCES:
patent: 5578976 (1996-11-01), Yao
patent: 6069540 (2000-05-01), Berenz et al.
patent: 6307169 (2001-10-01), Sun et al.
patent: 6777629 (2004-08-01), Lane et al.
patent: 1020010010224 (2001-02-01), None
patent: 1020020085988 (2002-11-01), None
Muldavin et al.; “High-Isolation CPW MEMS Shunt Switches—Part 1: Modeling”; IEEE; vol. 48, No. 6; Jun. 2000; pp. 1045-1052.
Tan et al.; “A DC-Contact MEMS Shunt Switch”; IEEE; vol. 12, No. 6; Jun. 2002, pp. 212-214.

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