Thermal wafer processor

Details Thermal wafer processor Thermal wafer processor

Filed on

2008-05-13

Date issued

2008-05-13

Examiner

Pelham, J. (Department: 3742)

Patent Class

Electric heating

SubClass

Heating devices

SubSubClass

Combined with container, enclosure, or support for material...

Other Related Categories

C219S403000, C219S411000, C432S241000, C392S416000, C392S418000, C165S064000, C118S724000, C118S725000, C118S729000

Type

Reexamination Certificate

Status

active

Patent number

11428742

Description

ABSTRACT:
A thermal processor may include a cooling jacket positionable around a process chamber within a process vessel or jar. A heater can move into a position substantially between the process chamber vessel and the cooling jacket. A holder having multiple workpiece holding positions is provided for holding a batch or workpieces or wafers. The process chamber vessel is moveable to a position where it substantially encloses the holder, so that wafers in the holder may be processed in a controlled environment. A cooling shroud may be provided to absorb heat from the heater before or after thermal processing. The thermal processor is compact and thermally shielded, and may be used in an automated processing system having other types of processors.

REFERENCES:
patent: 4738618 (1988-04-01), Massey et al.
patent: 4925388 (1990-05-01), Iseki et al.
patent: 5000682 (1991-03-01), Heidt et al.
patent: 5590996 (1997-01-01), Thompson et al.
patent: 5820366 (1998-10-01), Lee
patent: 5846073 (1998-12-01), Weaver
patent: 5904478 (1999-05-01), Weaver et al.
patent: 5908292 (1999-06-01), Smith et al.
patent: 5947718 (1999-09-01), Weaver
patent: 5994675 (1999-11-01), Bethune et al.
patent: 6164963 (2000-12-01), Weaver
patent: 6191388 (2001-02-01), Cleaver et al.
patent: 6879778 (2005-04-01), Yoo et al.

Affiliated with

Also associated with

Rating

Thermal wafer processor does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Thermal wafer processor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Thermal wafer processor will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3910005