Substrate processing apparatus

Details Substrate processing apparatus Substrate processing apparatus

2008-07-29

2008-07-29

Stinson, Frankie L (Department: 1792)

Cleaning and liquid contact with solids

Apparatus

With plural means for supplying or applying different fluids...

C134S148000, C134S153000, C134S200000, C134S901000

Reexamination Certificate

active

11616075

ABSTRACT:
The substrate processing apparatus has an enclosure structure enclosing a substrate support member to define a processing space. The enclosure structure has an opening closed by a shutter. A processing fluid supply unit, which supplies processing fluid, such as chemical liquid, is accommodated in a housing. The processing fluid supply unit accommodated in the housing is advanced into the processing space through the opening of the enclosure structure to feed the processing fluid onto the substrate supported by the substrate support member.

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