Measuring apparatus, exposure apparatus and device...

Details Measuring apparatus, exposure apparatus and device... Measuring apparatus, exposure apparatus and device...

2007-10-02

2007-10-02

Pyo, Kevin (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

Photocell controls its own optical systems

C355S053000, C356S515000

Reexamination Certificate

active

11267561

ABSTRACT:
A measuring apparatus for measuring optical performance of a target optical system to be measured includes an optical unit for splitting light from a light source into measuring light and reference light so that the measuring light can be introduced into the target optical system, a reflection unit for reflecting the measuring light from the target optical system toward the target optical system via a fluid, and a detector for detecting an interference fringe generated between interference between the measuring light that has emitted from the target optical system after being reflected by the reflection unit and the reference light that does not pass the target optical system.

REFERENCES:
patent: 2002/0118370 (2002-08-01), Nishida
patent: 2003/0128346 (2003-07-01), Murakami et al.
patent: 2005/0099635 (2005-05-01), Kakuchi et al.
patent: 2000-277411 (2000-10-01), None
patent: 2000-277412 (2000-10-01), None
patent: 2001-074605 (2001-03-01), None
patent: 2002-071513 (2002-03-01), None
patent: 2002-250678 (2002-09-01), None
patent: 2004-245744 (2004-09-01), None
patent: 2004-297046 (2004-10-01), None
patent: WO2004/053959 (2004-06-01), None

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