Optics: measuring and testing – By dispersed light spectroscopy – With sample excitation
Reexamination Certificate
2007-10-23
2007-10-23
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
By dispersed light spectroscopy
With sample excitation
C356S417000, C422S082080, C436S172000, C600S317000
Reexamination Certificate
active
11018759
ABSTRACT:
An apparatus images a surface. An imager stage linearly translates the surface in a first direction. A light path has a first end defining an input aperture perpendicular to the first direction and parallel to the surface, and a second end defining an output aperture. A plurality of radiation beams linearly scan and interact in time-multiplexed alternating turns with the surface below the input aperture to produce a time-multiplexed light signal that is collected by the input aperture and transmitted by the light path to the output aperture. A photodetector arrangement detects the light signal at the output aperture. A processor processes the detected time-multiplexed light.
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Bruce Richard H.
Curry Douglas N.
Fay Sharpe LLP
Giglio Bryan J
Palo Alto Research Center Incorporated
Toatley , Jr. Gregory J.
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