Stage device for positioning an object, in which a static...

Photocopying – Projection printing and copying cameras – Detailed holder for original

Reexamination Certificate

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C355S053000, C310S010000

Reexamination Certificate

active

11434104

ABSTRACT:
A stage device for positioning an object. The stage device includes a slider for holding the object, a driving section for driving the slider with respect to a base, wherein the slider is supported in a suspended state on the base by a static-pressure bearing and a pressurizing magnet, and a countering section for holding the driving section and canceling a reaction force that acts upon the driving section. The countering section is supported in a suspended state on the base by a static-pressure bearing and a pressurizing magnet. Also, the relation Fm=Fa+Fg is satisfied, wherein Fm represents the attraction force of the magnet, Fg the weight of the stage, and Fa the pressure produced by the static-pressure bearing.

REFERENCES:
patent: 5260580 (1993-11-01), Itoh et al.
patent: 5666038 (1997-09-01), Ohishi
patent: 5684856 (1997-11-01), Itoh et al.
patent: 5982128 (1999-11-01), Lee
patent: 6408045 (2002-06-01), Matsui et al.
patent: 6635887 (2003-10-01), Kwan et al.
patent: 2001/0015799 (2001-08-01), Asano et al.
patent: 2001/0028449 (2001-10-01), Miyajima et al.
patent: 2000-77503 (2000-03-01), None

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