Method of making a photosensor using selective epitaxial growth

Details Method of making a photosensor using selective epitaxial growth Method of making a photosensor using selective epitaxial growth

1989-05-25

1990-12-11

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

148DIG14, 148DIG97, 148DIG152, 357 30, 357 45, 437 62, 437 51, 437 53, 437 83, H01L 3118, H01L 2170

Patent

active

049770969

ABSTRACT:
An image photodetector includes a photosensor unit, a charge storage unit, and a switch unit, all of them are formed on a single-crystal semiconductor film grown from a single nucleus such that crystal formation is performed on a substrate having a free surface including a non-nucleus formation surface and a nucleus formation surface adjacent thereto. The non-nucleus formation surface has a low nucleation density. The nucleus formation surface has a sufficiently small area to allow growth of only the single nucleus and has a higher nucleation density that that of the non-nucleus formation surface.

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