Stage system including fine-motion cable unit, exposure...

Details Stage system including fine-motion cable unit, exposure... Stage system including fine-motion cable unit, exposure...

2007-10-09

2007-10-09

Fuller, Rodney (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S075000

Reexamination Certificate

active

11407152

ABSTRACT:
A stage system that reduces disturbances caused by deformation of a cable and achieves high-precision positioning. The stage system includes a substrate stage movable in at least two axial directions, a fine-motion cable unit that holds a cable and finely moves in at least two axial directions, and a coarse-motion cable unit that coarsely moves the fine-motion cable unit in at least one axial direction.

REFERENCES:
patent: 4723086 (1988-02-01), Leibovich et al.
patent: 6570645 (2003-05-01), Korenaga et al.
patent: 6693402 (2004-02-01), Ebihara et al.
patent: 6740891 (2004-05-01), Driessen et al.
patent: 6879377 (2005-04-01), Jacobs et al.
patent: 6937911 (2005-08-01), Watson
patent: 2003/0098966 (2003-05-01), Korenaga et al.
patent: 2000-106344 (2000-04-01), None
patent: 2002-43213 (2002-02-01), None

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