Electric heating – Metal heating – By arc
Reexamination Certificate
2007-10-16
2007-10-16
Evans, Geoffrey S. (Department: 1725)
Electric heating
Metal heating
By arc
C219S121730
Reexamination Certificate
active
10841857
ABSTRACT:
A material processing system and method is disclosed for processing materials such as amorphous silicon in an annealing processes and lithography processes on a silicon wafer, as well as ablation processes. A first laser generates periodic pulses of radiation along a beam path directed at the target material. Similarly, at least one additional laser generates periodic pulses. A beam aligner redirects the beam path of the at least one laser, such that the beam from the at least one additional laser is directed at the target along a path colinear with the first laser's beam path. As a result, all the lasers are directed at the target along the same combined beam path. The periodic pulses of the at least one additional laser are delayed relative to the first laser such that multiple pulses impinge on the target within a single pulse cycle of any given laser.
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Agarwal Vishnu K.
Stanton William A.
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