Piezoelectric thin-film resonator and process for producing...

Details Piezoelectric thin-film resonator and process for producing... Piezoelectric thin-film resonator and process for producing...

2007-10-02

2007-10-02

Dougherty, Thomas M. (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S363000, C310S364000, C333S187000, C029S025350, C216S041000

Reexamination Certificate

active

11295444

ABSTRACT:
A piezoelectric thin-film resonator includes a first excitation electrode and a second excitation electrode, the first excitation electrode being disposed opposite the second excitation electrode; a piezoelectric thin film disposed between the first excitation electrode and the second excitation electrode; and a substrate supporting the first excitation electrode, the substrate being composed of a LiTaO3single crystal or a LiNbO3single crystal, the first excitation electrode including an acoustic reflecting layer, the acoustic reflecting layer containing (a) at least one epitaxially grown first sublayer being composed of a conducting material and having a relatively high acoustic impedance; and (b) at least one epitaxially grown second sublayer being composed of another conducting material and having a relatively low acoustic impedance.

REFERENCES:
patent: 3891873 (1975-06-01), Yanagisawa et al.
patent: 5821833 (1998-10-01), Lakin
patent: 6975182 (2005-12-01), Loebl et al.
patent: 6995497 (2006-02-01), Inoue
patent: 7071795 (2006-07-01), Inoue
patent: 7173361 (2007-02-01), Saito et al.
patent: 2002-278558 (2002-09-01), None
patent: 2003-258594 (2003-09-01), None

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