Self-doped high performance complementary heterojunction field e

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357 15, 357 16, 357 22, 357 46, H01L 2702

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051423499

ABSTRACT:
A heterojunction field effect transistor structure having a plurality of vertically stacked field effect devices. Two or more devices having electrically independent source and drain regions are formed such that a single gate electrode controls current flow in each of the devices. Each of the vertically stacked FETs have electrically isolated channel regions which may be controlled by a single gate electrode. Vertically stacked devices provide greater device packing density.

REFERENCES:
patent: 4882608 (1989-11-01), Smith
Zhu et al.--Solid State Communications, vol. 75, No. 7, 1990, pp. 595-599.

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