Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2007-08-21
2007-08-21
Fuller, Rodney (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S077000
Reexamination Certificate
active
11396542
ABSTRACT:
A method and system are provided for printing a pattern on a photosensitive surface using a maskless lithography system including a spatial light modulator (SLM). The method includes defining two or more exposure areas within a predetermined region of the surface, each area corresponding to selected pixels of the SLM. An overlap region is formed between the two or more exposure areas, the overlapping region being defined by respective overlapping edges of the exposure areas, the overlapping edges corresponding to overlapping pairs of the selected pixels from each area. The pixels within each pair are alternately activated such that only one of the pixels within the pair is used to produce the pattern.
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Latypov Azat
Van Der Mast Karel
ASML Holding N.V.
Fuller Rodney
Sterne Kessler Goldstein & Fox P.L.L.C.
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