Projection exposure device

Details Projection exposure device Projection exposure device

2007-10-30

2007-10-30

Mathews, Alan (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S055000, C355S067000, C359S292000, C359S380000, C359S666000

Reexamination Certificate

active

10899816

ABSTRACT:
A magnification correction device1includes magnification correction optics2, a pressure adjustment device3and a controller4. The magnification correction optics2is formed in a shape of a box with a glass plate20and a bottom plate11positioned parallel to the glass plate20and a frame10. The inside of the box is an air room24connected to a pressure adjustment device3via a connecting pipe12so that the pressure of the inside can be changed. The cylinder30is driven by a motor35via a linear movement unit36such as a ball screw and the motor35is controlled by a controller4. The moving distance of cylinder30, which is equal to the moving distance of the piston, is decided by the number of the revolutions of the motor35, and the capacity of the closed circuit of the pressure adjustment device3is also decided.

REFERENCES:
patent: 4676631 (1987-06-01), Kosugi et al.
patent: 5774273 (1998-06-01), Bornhorst
patent: 6295118 (2001-09-01), Takeuchi
patent: 6738195 (2004-05-01), Matsumoto et al.
patent: 2003/0002169 (2003-01-01), Guy
patent: 08-124831 (1996-05-01), None

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