Optical engine using one-dimensional MEMS device

Incremental printing of symbolic information – Light or beam marking apparatus or processes – Scan of light

Reexamination Certificate

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C347S258000

Reexamination Certificate

active

10853030

ABSTRACT:
In one embodiment disclosed, an optical engine includes a light modulator coupled to illumination optics and imaging optics. The light modulator may be located at about an object plane. The imaging optics may include a scanner and a spatial filter located at about a transform (or pupil) plane. The scanner coupled with the light modulator may be configured to generate a continuous two-dimensional swath pattern for applications such as wafer processing, printed-circuit board (PCB) patterning/printing, and/or liquid crystal display (LCD) screen printing/patterning systems. Also, a method is disclosed that uses a high-speed one-dimensional light includes controlling a scanner in an optical engine system. The system may be used to provide a two-dimensional swath pattern. The system may use a continuous wave (CW) or other high repetition rate laser source and may provide a printing speed of greater than one Gpixel per second.

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