Metal working – Method of mechanical manufacture – Electrical device making
Reexamination Certificate
2007-06-12
2007-06-12
Kim, Paul (Department: 3729)
Metal working
Method of mechanical manufacture
Electrical device making
C029S603110, C029S603130, C029S603150, C029S603180, C216S022000, C216S048000, C360S316000, C360S324110, C360S324120, C360S324200
Reexamination Certificate
active
10672809
ABSTRACT:
The GMR read head includes a GMR read sensor and a longitudinal bias (LB) stack in a read region, and the GMR read sensor, the LB stack and a first conductor layer in two overlay regions. In its fabrication process, the GMR read sensor, the LB stack and the first conductor layer are sequentially deposited on a bottom gap layer. A monolayer photoresist is deposited, exposed and developed in order to open a read trench region for the definition of a read width, and RIE is then applied to remove the first conductor layer in the read trench region. After liftoff of the monolayer photoresist, bilayer photoresists are deposited, exposed and developed in order to mask the read and overlay regions, and a second conductor layer is deposited in two unmasked side regions. As a result, side reading is eliminated and a read width is sharply defined by RIE.
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Lin Tsann
Mauri Daniele
Guillot Robert O.
Hitachi Global Storage Technologies - Netherlands B.V.
Intellectual Property Law Offices
Kim Paul
LandOfFree
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