Piezoelectric device and method of manufacturing the device

Details Piezoelectric device and method of manufacturing the device Piezoelectric device and method of manufacturing the device

2007-02-13

2007-02-13

Dougherty, Thomas M. (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S363000

Reexamination Certificate

active

10399739

ABSTRACT:
A piezoelectric device includes a substrate, a buffer layer on the substrate, a lower electrode layer on the buffer layer, a piezoelectric layer on the lower electrode layer, and an upper electrode layer on the piezoelectric layer. The piezoelectric layer has a base portion extending outwardly at its lower portion of its periphery. The piezoelectric device provides enhanced bonding strength between the substrate and the stacked structure including the upper electrode layer, the lower electrode layer, and the piezoelectric layer.

REFERENCES:
patent: 5438231 (1995-08-01), Khoshnevisan et al.
patent: 6010919 (2000-01-01), Matsuhiro et al.
patent: 6021552 (2000-02-01), Kishima et al.
patent: 6307447 (2001-10-01), Barber et al.
patent: 2003/0066350 (2003-04-01), Machida et al.
patent: 2003/0132991 (2003-07-01), Higuchi et al.
patent: 2004/0132310 (2004-07-01), Nakatani et al.
patent: 2005/0000934 (2005-01-01), Nakatani et al.
patent: 2005/0099100 (2005-05-01), Kita et al.
patent: 0 675 355 (1995-10-01), None
patent: 2029092 (1980-03-01), None
patent: 06-347471 (1994-12-01), None
patent: 10-173476 (1998-06-01), None
patent: 2834355 (1998-10-01), None
patent: 2001-150825 (1998-11-01), None
patent: 2001-88301 (2001-04-01), None
patent: 2001-223404 (2001-08-01), None
Japanese International Search Report for PCT/JP02/08056, dated Nov. 19, 2002.
English translation of Form PCT/ISA/210.

Affiliated with

Also associated with

Rating

Piezoelectric device and method of manufacturing the device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Piezoelectric device and method of manufacturing the device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Piezoelectric device and method of manufacturing the device will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3886078