Method of interference fringe analysis for determining aspect of

Details Method of interference fringe analysis for determining aspect of Method of interference fringe analysis for determining aspect of

1995-06-07

1996-06-04

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356360, G01B 902

Patent

active

055238424

ABSTRACT:
A method for interference fringe analysis in which a subject surface is located in parallel to a reference surface and multiply step shifted a specific distance for each step to derive data and images of interference fringes for determining aspects of the geometry of the subject surface.

REFERENCES:
patent: 4832489 (1989-05-01), Wyant et al.

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