Piezoelectric element, piezoelectric actuator, ink jet...

Details Piezoelectric element, piezoelectric actuator, ink jet... Piezoelectric element, piezoelectric actuator, ink jet...

2007-10-30

2007-10-30

Meier, Stephen (Department: 2853)

Incremental printing of symbolic information

Ink jet

Ejector mechanism

C347S070000, C252S06290R, C310S358000

Reexamination Certificate

active

11130348

ABSTRACT:
A piezoelectric element includes a base substrate, a buffer layer formed above the base substrate, a piezoelectric film formed above the buffer layer, and a barrier layer formed above the piezoelectric film, wherein the buffer layer and the barrier layer are formed of Pb((Zr1-xTix)1-yNby)O3of a perovskite type, where x is in a range of 0≦x≦1, and y is in a range of 0.05≦y≦0.3, and the piezoelectric film is formed of a relaxor material of a perovskite type.

REFERENCES:
patent: 6613687 (2003-09-01), Hart et al.
patent: 2003/0222947 (2003-12-01), Tomozawa et al.
patent: 2001-223404 (2001-08-01), None

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