Light source unit and exposure apparatus having the same

Details Light source unit and exposure apparatus having the same Light source unit and exposure apparatus having the same

2007-10-02

2007-10-02

Wells, Nikita (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C355S069000, C355S071000, C355S053000

Reexamination Certificate

active

11181192

ABSTRACT:
A light source unit supplies the light radiated from the plasma, and includes a stabilizer for reducing a fluctuation of a position of the light radiated from the plasma.

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