Lithographic projection apparatus and reflector assembly for...

Details Lithographic projection apparatus and reflector assembly for... Lithographic projection apparatus and reflector assembly for...

2007-06-19

2007-06-19

Kim, Robert (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C359S357000

Reexamination Certificate

active

10647120

ABSTRACT:
A lithographic projection apparatus includes a grazing incidence collector. The grazing incidence collector is made up of several reflectors. In order to reduce the amount of heat on the collector, the reflectors are coated. The reflector at the exterior of the collector has an infrared radiating layer on the outside. The inner reflectors are coated with an EUV reflective layer on the outside.

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Herbert L. Anderson, “Physics Vade Mecum,” American Institute of Physics, p. 254, Figure B, (1981), XP-002300703.

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