Overlay key, method of manufacturing the same and method of...

Details Overlay key, method of manufacturing the same and method of... Overlay key, method of manufacturing the same and method of...

2007-10-16

2007-10-16

Lindsay, Jr., Walter (Department: 2812)

Semiconductor device manufacturing: process

Formation of electrically isolated lateral semiconductive...

Having substrate registration feature

C438S005000, C438S022000, C438S462000, C257SE23179

Reexamination Certificate

active

11175441

ABSTRACT:
An overlay key includes a first overlay key having a first main overlay pattern and a first auxiliary pattern, and a second overlay key having a second main overlay pattern and a second auxiliary overlay pattern, the second auxiliary overlay pattern formed at a location corresponding to the first auxiliary overlay pattern.

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