Optical: systems and elements – Deflection using a moving element – By moving a reflective element
Reexamination Certificate
2007-12-25
2007-12-25
Phan, James (Department: 2872)
Optical: systems and elements
Deflection using a moving element
By moving a reflective element
C359S214100
Reexamination Certificate
active
11349223
ABSTRACT:
An optical scanning apparatus includes a vibration mirror having a mirror surface that reflects an optical beam. A pair of torsion beams swingably support the mirror. The mirror is vibrated in a sealed space whose pressure is adjusted such that a characteristic of the mirror falls within a predetermined range.
REFERENCES:
patent: 5543956 (1996-08-01), Nakagawa et al.
patent: 5557444 (1996-09-01), Melville et al.
patent: 5629790 (1997-05-01), Neukermans et al.
patent: 5959760 (1999-09-01), Yamada et al.
patent: 6198565 (2001-03-01), Iseki et al.
patent: 6297898 (2001-10-01), Tanijiri et al.
patent: 6331052 (2001-12-01), Murai et al.
patent: 6352333 (2002-03-01), Matsumoto et al.
patent: 6485126 (2002-11-01), Kato et al.
patent: 6657765 (2003-12-01), Hayashi et al.
patent: 6682185 (2004-01-01), Hashimoto et al.
patent: 7-92409 (1995-04-01), None
patent: 9-197334 (1997-07-01), None
patent: 2924200 (1999-05-01), None
patent: 2981600 (1999-09-01), None
patent: 301114 (1999-12-01), None
patent: 2001-228428 (2001-08-01), None
patent: 2002-40353 (2002-02-01), None
patent: 2002-40355 (2002-02-01), None
patent: 2002-228965 (2002-08-01), None
patent: 2002-267995 (2002-09-01), None
patent: 2002-277809 (2002-09-01), None
patent: 2002-321195 (2002-11-01), None
K. E. Peterson, Journal of Research and Development, vol. 24, No. 5, pp. 631-637, “Silicon Torsional Scanning Mirror”, Sep. 1980.
H. Schenk, et al., The 13thAnnual International Conference on MEMS 2000, pp. 473-478, “An Electrostatically Excited 2D-Micro-Scanning-Mirror With an In-Plate Configuration of the Driving Electrodes”, Jan. 23-27, 2000.
H. Camon, et al., The 13thAnnual International Conference on MEMS 2000, pp. 645-650, “Fabrication Simulation and Experiment of a Rotating Electrostatic Silicon Mirror With Large Angular Deflection”, Jan. 23-27, 2000.
Oblon & Spivak, McClelland, Maier & Neustadt P.C.
Phan James
Ricoh & Company, Ltd.
LandOfFree
Optical scanning apparatus, optical writing apparatus, image... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Optical scanning apparatus, optical writing apparatus, image..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Optical scanning apparatus, optical writing apparatus, image... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3872155