Method of manufacturing a gas flow meter

Details Method of manufacturing a gas flow meter Method of manufacturing a gas flow meter

2007-06-12

2007-06-12

Kim, Paul D. (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S592100, C029S602100, C073S861354, C073S861355, C073S861357, C073S204230, C257S412000, C257S413000, C257S755000

Reexamination Certificate

active

11088175

ABSTRACT:
A gas flowmeter capable of reducing a secular change comprises a silicon semiconductor substrate formed with a cavity and a heat element formed above the cavity of the semiconductor substrate by way of an insulating film. The heat element is a silicon (Si) semiconductor thin film impurity-doped at high concentration. Stoichiometrically stable silicon nitride (Si3N4) thin films as barrier layers which less permeate and less absorb hydrogen in the heat generating temperature range of the heat element are formed above and below the silicon (Si) semiconductor thin film.

REFERENCES:
patent: 4478077 (1984-10-01), Bohrer et al.
patent: 5393351 (1995-02-01), Kinard et al.
patent: 6378365 (2002-04-01), Tu
patent: 6523403 (2003-02-01), Fuertsch et al.
patent: 6557411 (2003-05-01), Yamada et al.
patent: 6631638 (2003-10-01), James et al.
patent: 2001-194202 (2001-07-01), None
“High-rangeability ultrasonic gas flowmeter for monitoring flare gas”; Mylvaganam, K.S.; Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on vol. 36, Issue 2; Mar. 1989; pp. 144-149.
“A constant-temperature gas flowmeter with a silicon micromachined package”; Mastrangelo, C.H.; Muller, R.S.; Solid-State Sensor and Actuator Workshop, 1988. Technical Digest., IEEE; Jun. 6-9, 1988; pp. 43-46.

Affiliated with

Also associated with

Rating

Method of manufacturing a gas flow meter does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of manufacturing a gas flow meter, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of manufacturing a gas flow meter will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3870791