Method for the plasma assisted high vacuum physical vapor coatin

Details Method for the plasma assisted high vacuum physical vapor coatin Method for the plasma assisted high vacuum physical vapor coatin

1996-07-02

1998-08-11

Beck, Shrive

Coating processes

Direct application of electrical, magnetic, wave, or...

Pretreatment of substrate or post-treatment of coated substrate

427535, 427573, 4272481, 427314, 427318, 4273984, 4273985, C23C 1602

Patent

active

057925194

ABSTRACT:
The present invention relates to a novel method for the plasma assisted high vacuum vapor coating of parts with wear resistant coatings where the method comprises at least the process steps heating and conditioning and where the process step conditioning comprises heating. A protective gas is used for the heating. It is circulated at a pressure of at least 0.01 bar. Significant advantages are realized over state of the art methods using radiation heating. The method is preferentially carried out in an apparatus conceived for it, which comprises a blower (3), protective shields (8) and gas flow management sheets(9).

REFERENCES:
patent: 4749587 (1988-06-01), Bergmann et al.
patent: 4789333 (1988-12-01), Hemsath
patent: 5403628 (1995-04-01), Konig et al.
patent: 5487922 (1996-01-01), Nieh et al.
Falbe et al., Rompp Chemie Lexikon, New York. pp. 4854-4855 (for definitions of "rough", medium, and high vacuums). No available date.

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