Sputtering target, sintered compact, electrically conductive...

Details Sputtering target, sintered compact, electrically conductive... Sputtering target, sintered compact, electrically conductive...

2007-12-11

2007-12-11

Zimmerman, John J. (Department: 1775)

Stock material or miscellaneous articles

Composite

Of inorganic material

C428S697000, C428S699000, C428S701000, C252S519510

Reexamination Certificate

active

11454006

ABSTRACT:
A sintered article is fabricated which contains one or more of indium oxide, zinc oxide, and tin oxide as a component thereof and contains any one or more types of metal out of hafnium oxide, tantalum oxide, lanthanide oxide, and bismuth oxide. A backing plate is attached to this sintered article to constitute a sputtering target. This sputtering target is used to fabricate a conductive film on a predetermined substrate by sputtering. This conductive film achieves a large work function while maintaining as much transparency as heretofore. This conductive film can be used to achieve an EL device or the like of improved hole injection efficiency.

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