Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate
2007-10-23
2007-10-23
Pelham, Joseph M. (Department: 3742)
Electric heating
Heating devices
Combined with container, enclosure, or support for material...
C219S405000, C219S411000, C219S635000, C392S416000, C392S427000
Reexamination Certificate
active
10450154
ABSTRACT:
A method and system for inductively coupling energy to a heating filament (7A′,7B′,7C′,7A,7B,7C) in a thermal processing environment. By applying AC power to a coil antenna (11) and inductive coupling to a filament (e.g., a halogen lamp filament), a number of connections that are subject to fatigue is reduced, thereby increasing the reliability of the heater (2A,2B). Such an environment can be used to process semiconductor wafers (3) and liquid crystal displays.
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Pelham Joseph M.
Tokyo Electron Limited
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