Piezoelectric resonator, production method thereof, filter,...

Details Piezoelectric resonator, production method thereof, filter,... Piezoelectric resonator, production method thereof, filter,...

2007-06-12

2007-06-12

Schuberg, Darren E. (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C333S187000, C333S189000

Reexamination Certificate

active

10979277

ABSTRACT:
A piezoelectric resonator includes a substrate, a lower electrode provided on or above the substrate, a piezoelectric member provided on or above the lower electrode, an upper electrode provided on or above the piezoelectric member, and a cavity provided below a vibration member including the lower electrode, the piezoelectric member, and the upper electrode. In a case where a resonance frequency of vibration with a thickness of the vibration member being a half of a wavelength is taken as fr1, an average of ultrasonic velocity in a material forming the cavity is taken as Vc2, and a value determined based on the resonance frequency fr1and the average of ultrasonic velocity Vc2is λc (=Vc2/fr1), a depth t2of the cavity is set as,(2⁢n-1)×λ⁢⁢c4-λc8≦t2≦(2⁢n-1)×λ⁢⁢c4+λ⁢⁢c8,where n is an arbitrary natural number.

REFERENCES:
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Hiroyuki Nakamura et al., U.S. Appl. No. 10/979,276, filed Nov. 3, 2004.
Hiroshi Nakatsuka et al., U.S. Appl. No. 10/979,420, filed Nov. 3, 2004.

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