Optics: measuring and testing – Dimension
Reexamination Certificate
2007-12-18
2007-12-18
Nguyen, Sang H. (Department: 2886)
Optics: measuring and testing
Dimension
C356S365000, C356S237400
Reexamination Certificate
active
10958149
ABSTRACT:
A system that facilitates extraction of line edge roughness measurements that are independent of proprietorship of a metrology device comprises a structure patterned onto silicon with known line edge roughness values associated therewith. A metrology device obtains line edge roughness measurements from the structure, and a correcting component generates an inverse function based upon a comparison between the known line edge roughness values and the measured line edge roughness values. The metrology device can thereafter measure line edge roughness upon a second structure patterned on the silicon, and the inverse function can be applied to such measured line edge roughness values to enable obtainment of line edge roughness measurements that are independent of proprietorship of the metrology device.
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Capodieci Luigi
Marathe Amit P.
Singh Bhanwar
Subramanian Ramkumar
Advanced Micro Devices , Inc.
Amin Turocy & Calvin LLP
Nguyen Sang H.
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