Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2007-08-14
2007-08-14
Nguyen, Henry Hung (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S069000
Reexamination Certificate
active
11052088
ABSTRACT:
A projection exposure apparatus which has a projection optical system and projects a pattern onto a substrate through the projection optical system. The apparatus includes a sensor unit which includes a light-receiving element for detecting light incident through the projection optical system, a vessel in which the light receiving element is arranged, a sealing window which transmits the incident light and seals the vessel, and a driving mechanism which aligns the substrate. A space between the sealing window and the light-receiving element is filled with a liquid having a refractive index which is greater than one, and the liquid also serves as a coolant for cooling the driving mechanism.
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Fitzpatrick ,Cella, Harper & Scinto
Nguyen Henry Hung
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