Semiconductor integrated circuit device having partially constri

Details Semiconductor integrated circuit device having partially constri Semiconductor integrated circuit device having partially constri

1994-10-19

1996-06-04

Hille, Rolf

Active solid-state devices (e.g., transistors, solid-state diode

Combined with electrical contact or lead

Of specified material other than unalloyed aluminum

257776, 257775, 257756, H01L 213205, H01L 2188

Patent

active

055236251

ABSTRACT:
A semiconductor integrated circuit device has upper wirings extending on an inter-level insulating layer covering a lower wiring at spacing with zig-zag side surfaces between the upper wirings, and the zig-zag lines are transferred to the inter-level insulating layer so as to prevent the upper wirings from short circuit due to a residue of conductive material for the upper wirings.

REFERENCES:
patent: 4605470 (1986-08-01), Gwozdz et al.
patent: 4774561 (1988-09-01), Takagi
patent: 5296742 (1994-03-01), Sakai

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