Device comprising low outgassing photo or electron beam...

Details Device comprising low outgassing photo or electron beam... Device comprising low outgassing photo or electron beam...

2007-06-19

2007-06-19

McClendon, Sanza L. (Department: 1711)

Stock material or miscellaneous articles

Liquid crystal optical display having layer of specified...

With bonding or intermediate layer of specified composition

C428S001550, C428S343000, C428S345000, C428S3550RA, C428S3550EP, C428S3550EN, C428S3550BL, C428S3550AC, C428S500000, C428S523000, C264S001100, C264S001320, C264S001360, C264S001380, C359S896000, C522S141000, C522S142000, C522S157000, C522S158000, C522S159000, C522S160000, C522S161000, C522S071000

Reexamination Certificate

active

11002775

ABSTRACT:
Disclosed are photo or electron beam curable polymerizable compositions, and preparation thereof and devices containing such cured material. The composition contains completely or substantially completely hydrogenated hydrocarbon-based material completely free or substantially free of carbon-carbon double and triple bonds containing photo or electron beam curable terminal or pendant groups, low-outgassing photoinitiators, an optional viscosity adjustment component and an optional filler. The composition is visible light, UV or electron beam curable. It cures into a low-modulus, low outgassing polymer material. The composition can be used as an adhesive, sealant or lens potting material. It is ideal for use in lithographic tools and other optical devices involving deep or vacuum ultraviolet radiations, in particular, as lens potting materials for 248 nm, 193 nm and 157 nm lithographic tools, as well as other optical devices involving using high fluence irradiation.

REFERENCES:
patent: 4855382 (1989-08-01), Vanhaeren
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patent: 5382604 (1995-01-01), Erickson et al.
patent: 5491193 (1996-02-01), Erickson
patent: 6664318 (2003-12-01), Bymark et al.
patent: 6726856 (2004-04-01), Glausch
patent: 6903144 (2005-06-01), Erickson et al.
patent: 2004/0092618 (2004-05-01), Coykendall et al.
patent: WO01/81494 (2001-11-01), None

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